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Excimer laser ablation lithography applied to the fabrication of reflective diffractive optics

Author:

M. Flury,A. Benatmane,P. Gérard,P.C. Montgomery,J. Fontaine,T. Engel,J.P. Schunck,E. Fogarassy

Publication:

Applied Surface Science

Publisher:

Elsevier

Date:

15 March 2003

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