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Enhancing oxide/nitride selectivity in area-selective atomic layer deposition via pyridine-catalyzed inhibition

Author:

Jieun Oh,Woohyuk Kim,Hyeonggeun Lim,Soyoung Lee,Woo-Hee Kim

Publication:

Surfaces and Interfaces

Publisher:

Elsevier

Date:

15 August 2026

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