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Nitrogen bonding changes versus substrate temperature evidenced by X.P.S. in SiNxHy alloys prepared with NH3

Author:

L Kubler,R Haug,J.J Koulmann,D Bolmont,K Hill,A Jaegle

Publication:

Journal of Non-Crystalline Solids

Publisher:

Elsevier

Date:

2 December 1985

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