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Molecular effect on projected range in ultralow-energy ion implantation

Author:

K. Kimura,Y. Oota,K. Nakajima,M. Suzuki,T. Aoki,J. Matsuo,A. Agarwal,B. Freer,A. Stevenson,M. Ameen

Publication:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Publisher:

Elsevier

Date:

October 2003

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