Chapter:
Correlation between End-Of-range defect densities and electrical properties of p+/n junctions formed by B implantation into Ge-preamorphised Si substrates
Book:
Ion Beam Modification of Materials
Author:
D. Alquier,C. Bergaud,A. Martinez,M. Minondo,C. Jaussaud,L. Laanab,C. Bonafos,A. Qaverie
Copyright © 1996 Elsevier Science B.V. Published by Elsevier B.V. All rights reserved.