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Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography

Author:

Diogo E. Aguiam,Joana D. Santos,Carlos Silva,Fabio Gentile,Carlos Ferreira,Inês S. Garcia,Joåo Cunha,João Gaspar

Publication:

Micro and Nano Engineering

Publisher:

Elsevier

Date:

April 2022

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