Numerical analysis of effect of thermal stress depending on pulling rate on behavior of intrinsic point defects in large-diameter Si crystal grown by Czochralski method
Author:
Yuji Mukaiyama,Koji Sueoka,Susumu Maeda,Masaya Iizuka,Vasif M. Mamedov
Publication:
Journal of Crystal Growth
© 2019 Elsevier B.V. All rights reserved.