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Source/drain metallization effects on the specific contact resistance of indium tin zinc oxide thin film transistors

Author:

Cam Phu Thi Nguyen,Thanh Thuy Trinh,Jayapal Raja,Anh Huy Tuan Le,Youn-Jung Lee,Vinh Ai Dao,Junsin Yi

Publication:

Materials Science in Semiconductor Processing

Publisher:

Elsevier

Date:

November 2015

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