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Effect of vacuum annealing temperature on microstructure and tribological properties of CVD-SiC

Author:

Ran Liu,Song Yang,Qingzhi Ma,Renhao Hu,Xuhua Lu,Yunzhou Xue,Shaolong He,Lianyi Xu,Ying Wang,Rongbin Li,Pan Gao

Publication:

Vacuum

Publisher:

Elsevier

Date:

October 2026

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