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A mass-balanced through-wafer electrostatic x/y-scanner for probe data storage

Author:

J.B.C. Engelen,H.E. Rothuizen,U. Drechsler,R. Stutz,M. Despont,L. Abelmann,M.A. Lantz

Publication:

Microelectronic Engineering

Publisher:

Elsevier

Date:

April–June 2009

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