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Transient behaviors of radicals and ions of CxFy and SFx during alternative injections C4F8 and SF6 in Ar plasma

Author:

Taito Yoshie,Tran Trung Nguyen,Thi-Thuy-Nga Nguyen,Kenichi Inoue,Takayoshi Tsutsumi,Kenji Ishikawa

Publication:

Vacuum

Publisher:

Elsevier

Date:

October 2026

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