Improved film density for coatings at grazing angle of incidence in high power impulse magnetron sputtering with positive pulse

Author:

F. Avino,D. Fonnesu,T. Koettig,M. Bonura,C. Senatore,A.T. Perez Fontenla,A. Sublet,M. Taborelli

Publication:

Thin Solid Films

Publisher:

Elsevier

Date:

31 July 2020

© 2020 The Authors. Published by Elsevier B.V.

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