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Investigation on solid phase epitaxy of deposited SiGe film on a Si substrate

Author:

Wen-Jie Qi,Bing-Zong Li,Guo-Bao Jiang,Zhi-Guang Gu,T.K. Kwok,R.J. Zhang,P.K. Chu

Publication:

Thin Solid Films

Publisher:

Elsevier

Date:

30 January 1997

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