Radio-frequency capacitively coupled plasma parameters evolution as a function of magnetic field strength
Author:
Paul Hiret,Artem Dmitriev,Éric Faudot,Jérôme Moritz,Stéphane Heuraux,Frédéric Brochard,Roland Steiner,Laurent Marot,Alessandro Geraldini,Ivo Furno,Ernst Meyer
© 2025 The Authors. Published by Elsevier Ltd.