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BST thin films grown in a multiwafer MOCVD reactor

Author:

F. Fitsilis,S. Regnery,P. Ehrhart,R. Waser,F. Schienle,M. Schumacher,M. Dauelsberg,P. Strzyzewski,H. Juergensen

Publication:

Journal of the European Ceramic Society

Publisher:

Elsevier

Date:

2001

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