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Effect of In implantation and annealing on the lattice disorder and nano-mechanical properties of GaN

Author:

K. Filintoglou,P. Kavouras,M. Katsikini,J. Arvanitidis,D. Christofilos,S. Ves,E. Wendler,W. Wesch

Publication:

Thin Solid Films

Publisher:

Elsevier

Date:

15 March 2013

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