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Proton exchange membrane electrolysis (PEMWE) producing low-carbon Ozone for application in green semiconductor manufacturing processes

Author:

Wasim Abbas,Guo-Bin Jung,Abdulaziz Atabani,Jyun-Wei Yu,Pan-Yen Chen,Fang-Bor Weng,Pandu Ranga Tirumalasetti

Publication:

International Journal of Hydrogen Energy

Publisher:

Elsevier

Date:

11 February 2026

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