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Charge trapping induced frequency-dependence degradation in n-MOSFETs with high-k/metal gate stacks

Author:

Chih-Hao Dai,Ting-Chang Chang,Ann-Kuo Chu,Yuan-Jui Kuo,Ya-Chi Hung,Wen-Hung Lo,Szu-Han Ho,Ching-En Chen,Jou-Miao Shih,Wan-Lin Chung,Hua-Mao Chen,Bai-Shan Dai,Tsung-Ming Tsai,Guangrui Xia,Osbert Cheng,Cheng Tung Huang

Publication:

Thin Solid Films

Publisher:

Elsevier

Date:

30 December 2011

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