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Laser detection of surface acoustic waves as a method of measuring an Ar ion beam modification of carbon thin film

Author:

Sin-iti Kitazawa,Teguh Yulius Surya Panca Putra,Seiji Sakai,Kazumasa Narumi,Hiroshi Naramoto,Shunya Yamamoto,Atsuya Chiba

Publication:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Publisher:

Elsevier

Date:

May 2003

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