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Laser-assisted plasma-enhanced chemical vapor deposition of silicon nitride thin film

Author:

Hung-Sheng Tsai,Gwo-Juinn Jaw,Sheng-Hsiung Chang,Chao-Chia Cheng,Ching-Ting Lee,Hai-Pei Liu

Publication:

Surface and Coatings Technology

Publisher:

Elsevier

Date:

23 October 2000

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