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Oxygen diffusion barrier on interfacial layer formed with remote NH3 plasma treatment

Author:

Dun-Bao Ruan,Kuei-Shu Chang-Liao,Hsin-I Yeh,Fu-Yang Chu,Kai-Chun Yang,Po-Chun Wu,E-Ray Hsieh

Publication:

Surface and Coatings Technology

Publisher:

Elsevier

Date:

15 October 2021

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