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Cross-sectional nanoprobing sample preparation on sub-micron device with fast laser grooving technique

Author:

P.K. Tan,Y.Z. Zhao,F. Rivai,B.H. Liu,Y.L. Pan,R. He,H. Tan,Z.H. Mai

Publication:

Microelectronics Reliability

Publisher:

Elsevier

Date:

September 2018

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