Trench-filling germanium epitaxial layers on silicon for surface-illuminated near-infrared photodetectors
Author:
So Nozaki,Takumi Maeda,Jose A. Piedra-Lorenzana,Daisuke Akai,Takeshi Hizawa,Tetsuya Nakai,Yasuhiko Ishikawa
Publication:
Materials Science in Semiconductor Processing
© 2026 The Authors. Published by Elsevier Ltd.