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Influence of chemical bonding on the material removal of tantalum for the application of chemical mechanical polishing

Author:

Jiaxin Zheng,Liang Jiang,Yongshun Zhang,Xia Zhong,Yuting Wei,Liao Zhou,Shijie Zhao,Linmao Qian

Publication:

Wear

Publisher:

Elsevier

Date:

15 April 2026

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