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Impacts of AlGeO formation by post thermal oxidation of Al2O3/Ge structure on interfacial properties

Author:

Shigehisa Shibayama,Kimihiko Kato,Mitsuo Sakashita,Wakana Takeuchi,Noriyuki Taoka,Osamu Nakatsuka,Shigeaki Zaima

Publication:

Thin Solid Films

Publisher:

Elsevier

Date:

30 April 2014

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