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FTIR and Raman study of rapid thermal annealing and oxidation effects on structural properties of silicon-rich SixC1-x thin films deposited by R.F co-sputtering

Author:

Abdel-ilah El khalfi,Elmaati Ech-chamikh,Youssef Ijdiyaou,Mustapha Azizan,Abdelhadi Essafti,Lahcen Nkhaili,Abdelkader El Kissani,Eric Tomasella

Publication:

Vibrational Spectroscopy

Publisher:

Elsevier

Date:

March 2017

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