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Improved design of optical-microforce sensor with high thermal-mechanical stability for insulation charge ellipsometer testing application

Author:

Haoyu Gao,Tianrun Qi,Hanwen Ren,Qingmin Li,Yiqun Ma,Tao Xiao,Yidan Ma,Jian Wang

Publication:

Sensors and Actuators A: Physical

Publisher:

Elsevier

Date:

16 December 2024

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