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Frequency dependence of FinFETs with 3-nm HfZrO down to 5-ns based on transient CMOS inverter characteristics

Author:

Yuwei Cai,Qingzhu Zhang,Zhaohao Zhang,Wenxiu Dong,Yao Li

Publication:

Materials Letters

Publisher:

Elsevier

Date:

15 October 2026

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