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Ultrathin silicon oxide prepared by in-line plasma-assisted N2O oxidation (PANO) and the application for n-type polysilicon passivated contact

Author:

Yuqing Huang,Mingdun Liao,Zhixue Wang,Xueqi Guo,Chunsheng Jiang,Qing Yang,Zhizhong Yuan,Dandan Huang,Jie Yang,Xinyu Zhang,Qi Wang,Hao Jin,Mowafak Al-Jassim,Chunhui Shou,Yuheng Zeng,Baojie Yan,Jichun Ye

Publication:

Solar Energy Materials and Solar Cells

Publisher:

Elsevier

Date:

May 2020

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