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Evaluating the abrasive wear of Zn1− x Mn x O heteroepitaxial layers using a nanoscratch technique

Author:

Yu-Ming Chang,Hua-Chiang Wen,Chu-Shou Yang,Derming Lian,Chien-Huang Tsai,Jyh-Shyang Wang,Wen-Fa Wu,Chang-Pin Chou

Publication:

Microelectronics Reliability

Publisher:

Elsevier

Date:

August 2010

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