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Comparative studies of the feed gas composition effects on the characteristics of DLC films deposited by magnetron sputtering

Author:

J Libardi,K Grigorov,M Massi,C Otani,S.P Ravagnani,H.S Maciel,M Guerino,J.M.J Ocampo

Publication:

Thin Solid Films

Publisher:

Elsevier

Date:

1 July 2004

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