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High-quality AlGaN epitaxy on lattice-engineerable AlN template for high-power UVC light-emitting diodes

Author:

Sebastian Walde,Cheng-Yao Huang,Chia-Lung Tsai,Wen-Hsuang Hsieh,Yi-Keng Fu,Sylvia Hagedorn,Hung-Wei Yen,Tien-Chang Lu,Markus Weyers,Chia-Yen Huang

Publication:

Acta Materialia

Publisher:

Elsevier

Date:

March 2022

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