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Systematic thermal processing of GaN epilayers: Temperature-Driven surface evolution and kinetic analysis

Author:

Wafa Malek,Mouna Bennour,Mohamed Bouzidi,Adama Mballo,Phuong Vuong,Turki Alkathiri,Sultan Albarakati,Noureddine Chaaben,Jean-Paul Salvestrini,Mohammad Khaled Shakfa

Publication:

Materials Science in Semiconductor Processing

Publisher:

Elsevier

Date:

September 2026

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