Isolation of bidimensional electron gas in AlGaN/GaN heterojunction using Ar ion implantation
Author:
Antonino Scandurra,Matteo Testa,Giorgia Franzò,Giuseppe Greco,Fabrizio Roccaforte,Maria Eloisa Castagna,Cristiano Calabretta,Andrea Severino,Ferdinando Iucolano,Elena Bruno,Salvatore Mirabella
Publication:
Materials Science in Semiconductor Processing
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