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Effect of deposition conditions and post deposition anneal on reactively sputtered titanium nitride thin films

Author:

Nikhil K. Ponon,Daniel J.R. Appleby,Erhan Arac,P.J. King,Srinivas Ganti,Kelvin S.K. Kwa,Anthony O'Neill

Publication:

Thin Solid Films

Publisher:

Elsevier

Date:

2 March 2015

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