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Fabrication of SiGe/Ge nanostructures by three-dimensional Ge condensation of sputtered SiGe on SiO2/Si substrate

Author:

Guangyang Lin,Haiyang Hong,Jie Zhang,Yuying Zhang,Peng Cui,Jianyuan Wang,Songyan Chen,Yong Zhao,Chaoying Ni,Cheng Li,Yuping Zeng

Publication:

Journal of Alloys and Compounds

Publisher:

Elsevier

Date:

25 March 2021

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