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Design, modeling, fabrication, packaging and characterization of MEMS screech sensor

Author:

A. Sthuthi,G. Nithya,Veda Sandeep Nagaraja

Publication:

Materials Today: Proceedings

Publisher:

Elsevier

Date:

2022

Copyright © 2022 Elsevier Ltd. All rights reserved. Selection and peer-review under responsibility of the scientific committee of the Third International Conference on Recent Advances in Materials and Manufacturing 2021.

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