Title:

Coherent diffraction lithography: Periodic patterns via mask-based interference lithography

Author:

Corey P. Fucetola,Amil A. Patel,Euclid E. Moon, et al.

Publication:

Journal of Vacuum Science & Technology B

Volume/Issue

27/6

Publisher:

American Vacuum Society

Date:

Dec 31, 1969

Page Count:

4

Rights managed by AIP Publishing.
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